Simulation Of In-Line Sputtering Coaters

Reactive sputtering of homogeneous layers on large substrates e.g. for architectural glazing, is a challenging technology due to complex interactions between gas dynamics, discharge plasma and power supply. As a milestone towards model-based control of incline sputtering coaters, a simulation model called "DOGMA" has been developed at the Fraunhofer Institute. This model allows for the prediction of gas flow kinetics and overall process dynamics of the sputtering process, and is explained in this article.