Optical Glass For Photolithographic Lenses

Glasses for photolithographic lenses available from Jenaer Glaswerk GbmH are described, with brief details of their specification and the test procedures used.

Author
H-J Pohl, G Schmidt, W Lodel
Origin
Carl Zeiss Jena Gmbh
Journal Title
Jena Review 1990 2 81
Sector
Special Glass
Class
S 440

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Optical Glass For Photolithographic Lenses
Jena Review 1990 2 81
S 440
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