Introduction To Novel Thin Film Processes

This article describes two novel coatings or surface modification technologies provided by Finnish company, Beneq. While nHALO (hot aerosol layering operation) technology is mainly for the glass and ceramics industries, ALD (atomic layer deposition) technology covers several industrial coating applications. Beneq's background comes from the optical fibre sector under Nextrom, the world's premier supplier of Modified Chemical Vapour Deposition (MCVD) manufacturing solutions and services for optical fibre preform manufacturing. Industrial ALD-coating technology has its roots in the world's largest ALD coating operation for Thin Film Electroluminiescent (TFEL) display panels.

Author
M Saikkonen & J Maula
Origin
Beneq Oy, Finland
Journal Title
Vacuum International 1/2008 18-22
Sector
Flat glass
Class
F 2469

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Introduction To Novel Thin Film Processes
Vacuum International 1/2008 18-22
F 2469
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