High Rate Sputtering Technology For Throughput And Quality

Although invented nearly 30 years ago, magnetron sputtering remains the preferred deposition technique for large area deposition of precisely controlled thin films. Complex multiple-layer metal/dielectric stacks are routinely deposited on glass, plastic and metals for solar control, low-emissivity, anti-static and anti-reflective, electromagnetic interference, transparent conductors, and a wide variety of other applications. Throughout this period of growth, three major restrictions on the deposition of dielectric films have been the main impediment to improvements in productivity, product quality and yield.