Thin films of a composite of molybdenum disilicate (MoSi2) and silicon (Si) were fabricated by radio frequency magnetron sputtering using a target made of a powder mixture of MoSi2 and Si with a molar ratio of Si to Mo of 1:X (2.0
Origin
Doshisha University, Kyoto, Japan
Journal Title
J Aust Ceram Soc 47 2 2011 69-73
Sector
Special Glass
Class
S 3732