Alumina Barrier Layers On Lcd Glass

Effective diffusion coefficients, De, for the movement of sodium from an LDC glass into a sputtered alunina barrier layer have been determined. Secondary ion mass spectrometry analysis was used to measure sodium concentrations in 100nm thick alumina films on soda lime glass at 520 deg C and for similar films on alkaline earth boroaluninosilicate glass at 650 deg C.