Varian: Dedicated Vacuum Solutions For Thin Film Deposition

The need for specific, high performance turbo pumps is an everyday need & request for the market of high tech vacuum used in coating systems worldwide. This article takes a look at the recent product from Varian - the Turbo-V 3K-G System - which is, according to the manufacturer, an application specific, high performance 22001/s class turbo pumping system.

Author
Un-named
Origin
Unknown
Journal Title
Vacuum International 4/08 20-23
Sector
Special Glass
Class
S 3463

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Varian: Dedicated Vacuum Solutions For Thin Film Deposition
Vacuum International 4/08 20-23
S 3463
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