LayTec has expanded the range of applications of its unique in-situ sensors to sputter processes. According to the German firm, its EpiR DA sensor can now be used for deposition rate analysis and determination of thin-film optical properties during sputter processes. Multiple head configurations provide perfect homogeneity control and run-to-run comparison. Moreover, an end-point detection interface has been developed to link the reflectance measurement system to the sputter system and to establish a feedback control from the measurement system, providing a very accurate spectroscopic reflectance measurement and is ideally sited for a complete analysis of optical properties during every step of the deposition process. For more information please see: www.laytec.de
