In-Situ Measurement Of Thickness And Resistivity

TNO Glass Group has developed a measuring system that enables the manufacturer to monitor the quality of its TCO layer in-situ. Transparent conducting oxides (TCO) have transparency for visible light, reflectivity for infrared light and a low sheet resistance, making them suitable for a wide variety of applications such as low-E coatings on glass, electrochromic windows, flat panel displays and electrodes in solar cells. In order to optimise and control the TCO production process, the thickness, reflectivity, carrier concentration, mobility and sheet resistance must be monitored. These parameters are key performance indicators (KPI) for the quality of the coating. The newly developed system can enhance product uniformity by enabling an effective control strategy based on these KPIs.

Author
Un-named
Origin
Unknown
Journal Title
Glass June/03 140
Sector
Special Glass
Class
S 2535

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In-Situ Measurement Of Thickness And Resistivity
Glass June/03 140
S 2535
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