Project And Manufacturing Of A High-Vacuum, Six-Axes Micromanipulator For Low Temperature Spectroscopy

In the framework of the CryoAlp project, a micro positioning system with six degrees of freedom devoted to spectroscopy experiments in a high vacuum regime was developed and tested. The characteristics of this micrometric system: compactness, wide operating range combined to high precision; capability to perform mapping of sample surfaces with complex geometries; compatibility with high-vacuum; operating temperatures down to -50 deg C; make it a unique system, tailored to specific requirements of non-conventional experiments, such as those looking at samples with a non-homogeneous surfaces, in a controlled temperature regime in vacuum.

Author
Un-named
Origin
Unknown
Journal Title
Vacuum International 2/2007 52-58
Sector
Special Glass
Class
S 3237

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Project And Manufacturing Of A High-Vacuum, Six-Axes Micromanipulator For Low Temperature Spectroscopy
Vacuum International 2/2007 52-58
S 3237
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