Physical Vapour Deposition

Coating solid surfaces with thin films by condensation from the vapour phase is called physical vapour deposition (PVD), if only physical effects are involved. If the film forming process involves chemical reactions one has the special case of reactive evaporation. This paper looks at both these methods in detail.

Author

U Jeschkowski & H Niederwald

Origin

Unknown

Journal Title

Schott Research 1996-1998 311-326

Sector

Special Glass

Class

S 1833

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Journal Title Schott Research 1996-1998 311-326

Class S 1833

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Physical Vapour Deposition

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