Magnetically Levitated Turbomolecular Vacuum Pumps

With considerable experience and a leading position in vacuum technology, this article presents ian innovative new product from Edwards Vacuum, a new generation of turbo pumps. These products have been designed to respond to harsh semiconductor environments and applications and meet the requirements of the glass coating and solar markets.

Author
Un-named
Origin
Unknown
Journal Title
Vacuum Technology 2/08 16-17
Sector
Special Glass
Class
S 3362

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Magnetically Levitated Turbomolecular Vacuum Pumps
Vacuum Technology 2/08 16-17
S 3362
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