Glass Wafers For Mems

Glass wafers from Schott not only offer the highest quality, but can also be made to meet individual customer requirements. The MEMS (Micro-Electro-Mechanical Systems) market is experiencing a boom. In 2006, global sales of micro-electromechanical systems amounted to around US$17BN. In 2009, this figure is expected to surpass US$25BN. These extremely small components are used in micro-optics & biochips, print heads & acceleration sensors that ignite air bags. The highest possible precision is required in manufacturing glass wafers. They either serve as a substrate material or stabilising element and are often combined with silicon components. However, they can also take on an active role on their own, as ducts used to mix chemicals in micro reactors or as substrates for laser lenses, for example.

Author
Un-named
Origin
Unknown
Journal Title
Vacuum International 2/2007 50
Sector
Special Glass
Class
S 3236

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Glass Wafers For Mems
Vacuum International 2/2007 50
S 3236
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