Conformality Of Ceramic Oxygen Barrier Coatings On Micro-And Nanoscale Features By Pulsed-Pressure Mocvd

A ceramic thin film or coating layer is of interest for thermal and oxidation barrier application in hypersonic vehicles. The target structural material for hypersonic flight is silicon carbide composites. This paper describes the development of the Pulsed-Pressure Metalorganic Chemical Vapor Deposition (PP-MOCVD) processing method and experience with ceramic coatings on 3-D shaped. It also discusses the critical issue of scale-up for coating of complex shapes and large objects. The PP-MOCVD method does not use a carrier gas, and thus eliminated viscous and thermally driven flow effects. This produced a uniform molecular arrival rate over the surface of the part. SEM images show the uniformity of the coating over the objects. A new model was used for reactor design for coating a batch of parts to a prescribed film thickness and uniformity at a required production throughput.

Author
S Krumdieck
Origin
Unknown
Journal Title
Journal Of The Australian Ceramic Society 48 1 2012 69-79
Sector
Special Glass
Class
S 3859

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Conformality Of Ceramic Oxygen Barrier Coatings On Micro-And Nanoscale Features By Pulsed-Pressure Mocvd
Journal Of The Australian Ceramic Society 48 1 2012 69-79
S 3859
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