The replacement of glass by plastic for optical applications is a challenge for modern vacuum and plasma techniques. Antireflection as the most required surface function for plastic optics can be obtained by means of optical interference coatings or surface structures. The low-pressure plasma present in modern vacuum processes provides possibilities to activate substrate surfaces, densify growing layers and adjust mechanical and thermal stresses. Plasma ion-assisted deposition has been found as a suitable technology for coating polymers. Design type Ar-hardr has been used for providing a high abrasion resistance, together with an antireflection function of variable bandwidth. In the case of PMMA, the plasma degradation process offer an interesting alternative to achieve antireflective properties.
